Tsuneo URISU, Toshio IBUKI (Kyoto Educational Univ.), Yoshiaki IMAIZUMI and Masahiro KAWASAKI (Hokkaido Univ.)
[Nuclear Instruments and Method in Phys. Res. B 122, 364 (1997)]
An absorption spectrum in the vacuum ultra violet region and a photoelectron spectrum for the valence-electron-states of the gas phase dimethyl aluminum hydride (DMAH) were measured and the energy levels of the DMAH electronic states were determined. Using this result, it was concluded that the difference of the carbon contamination in photo-stimulated Al deposition between white beam synchrotron radiation and MgK (alpha) line irradiation excites valence electron-states, mainly (pi)CH3 state, and breaks the C-H bond. On the other hand, in the case of SR irradiation, not only valence-electron-states, but also Al 2p and Al 2s core-electron states are excited and the Al-C bond is broken. This indicates the usefulness of the photochemical site-specific processing.
Figure 1. Photoabsorption cross sections of DMAH observed at 1 x 10-2 Torr. The spectral resolution is 0.2 nm. The Rydberg assignments are indicated.